Product specification
Measurement accuracy: WSI: <0.5nm PSI: <0.1nm
Work table: 610 × 610mm (customizable)
Scan range: 0-270um (Z direction)
the optical magnification: X5, X10, X20, X50
Product features
High accuracy and fast measurement
Superior repeatability and reproducibility
Laboratories amount Measurement, production line automatic measurement meets demand
Report generation, data feedback function
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sales@accutech.net.cn